The 3-Zone tube furnace is a versatile piece of equipment designed for precise thermal processing applications such as annealing and chemical vapor deposition (CVD). It features three independently controlled heating zones, allowing for excellent temperature uniformity and gradient control. The furnace can accommodate samples up to 60mm in size and supports gas delivery at various pressures, including atmospheric and sub-atmospheric conditions. Key capabilities include flexible gas handling, minimal particle generation, and compatibility with process gases like Ar, 4%H2 in Ar, and N2. These features make it ideal for research and industrial applications requiring controlled thermal environments.
Key Points Explained:
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Flexible Thermal Processing Capabilities
- The 3 zone tube furnace is designed for annealing and chemical vapor deposition (CVD) at temperatures below 1000°C.
- Three independently controlled heating zones enable precise temperature gradients, critical for uniform material treatment.
- Applications include vacuum sintering (improving material density) and vacuum annealing (stress relief and microstructure uniformity).
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Sample Handling and Size Compatibility
- Accommodates samples up to 60mm (2 inches) in size, suitable for small to medium-scale experiments.
- Vertical designs minimize particle generation, while automatic wafer/boat transfer systems enhance productivity.
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Advanced Gas Delivery System
- Equipped with a manifold for introducing process/purge gases (e.g., Ar, 4%H2 in Ar, N2) at atmospheric or sub-atmospheric pressures.
- Quartz tube compatibility ensures chemical inertness and high-temperature stability.
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Temperature and Atmosphere Control
- Excellent temperature distribution across zones, crucial for consistent results in material synthesis.
- Supports vacuum or controlled atmosphere processing, enabling oxidation-sensitive treatments.
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Key Components and Safety Features
- Heating system: Electric resistance elements (e.g., SiC, MoSi2) for efficient energy use.
- Cooling: Desiccators for safe post-heating sample transfer, preventing contamination.
- Control: PID/PLC systems automate temperature profiles and process sequences.
These capabilities make the 3-Zone tube furnace indispensable for labs and industries focused on advanced material development, semiconductor processing, and precision heat treatments. Its modular design and gas flexibility cater to evolving research needs while ensuring reproducibility.
Summary Table:
| Feature | Description |
|---|---|
| Heating Zones | Three independently controlled zones for precise temperature gradients. |
| Sample Size | Accommodates samples up to 60mm (2 inches). |
| Gas Delivery | Supports Ar, 4%H2 in Ar, N2 at atmospheric/sub-atmospheric pressures. |
| Temperature Control | Excellent uniformity for consistent material synthesis. |
| Applications | Annealing, CVD, vacuum sintering, and oxidation-sensitive treatments. |
| Safety & Automation | PID/PLC systems, desiccators, and inert quartz tube for reliable operation. |
Upgrade your lab with precision thermal processing!
KINTEK's 3-Zone tube furnace delivers unmatched temperature control, gas flexibility, and uniform heating—perfect for advanced material research and semiconductor applications. Our in-house R&D and deep customization ensure your unique experimental needs are met.
Contact us today to discuss how our high-temperature furnace solutions can enhance your workflow.
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