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Multi Heating Zones CVD Tube Furnace Machine for Chemical Vapor Deposition Equipment

CVD & PECVD Furnace

Multi Heating Zones CVD Tube Furnace Machine for Chemical Vapor Deposition Equipment

Item Number : KT-CTF14

Price varies based on specs and customizations

Max. temperature
1400℃
Heating zone
2x450mm
Temperature control accuracy
±1℃
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Discover KINTEK's Advanced Multi-Zone CVD Tube Furnaces

At KINTEK, we leverage exceptional R&D and in-house manufacturing to provide diverse laboratories with advanced high-temperature furnace solutions. Our Multi-Zone CVD Tube Furnaces are engineered for precision, reliability, and adaptability, empowering your research and production processes.

Product Showcase: Multi-Heating Zones CVD Tube Furnace

5 heating zones CVD furnace with high vacuum pump
5 heating zones CVD furnace with high vacuum pump
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4 heating zones split cvd furnace.
2 heating zones CVD furnace with touch screen MFC gas station
2 heating zones  CVD furnace with touch screen MFC gas station
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1600C 3 heating zones CVD furnace with water cooling flange
Schematic diagram of the typical reaction chamber structure of tubular PECVD equipment

Schematic diagram of the typical reaction chamber structure of tubular PECVD equipment  1. Exhaust hole；2. Tail end flange；3. Tail water cooling flange；4. Tail sealing flange；5. Tail fixing flange；6. Electrode rod；7. Graphite boat；8. Quartz furnace tube；9. Front fixing flange；10. Front water cooling flange；11. Front air inlet flange；12. Furnace door

What is a Multi-Zone CVD Tube Furnace?

A multi-zone Chemical Vapor Deposition (CVD) tube furnace is specialized laboratory equipment designed for depositing thin films on substrates through chemical reactions of gases or vapors. The critical advantage of "multi-zone" design lies in its multiple, independently controlled heating zones. This allows for precise manipulation of the temperature profile within the furnace, a crucial factor for many CVD processes as temperature directly influences the properties of the deposited film. These furnaces are indispensable for both cutting-edge research and development and demanding production applications.

Why Choose KINTEK's Multi-Zone CVD Furnaces?

KINTEK's Multi-Zone CVD Tube Furnaces are engineered to deliver superior performance and adaptability for your critical processes. Here’s how we empower your work:

  • Unmatched Temperature Precision: Independent heating zones allow for the creation of extended constant temperature fields or precisely controlled temperature gradients, essential for uniform deposition and specialized material synthesis.
  • Advanced Process Control: PID programmable temperature control ensures excellent accuracy. Coupled with remote and centralized control capabilities, you gain flexibility and ease of monitoring.
  • Stable and Accurate Gas Delivery: High-accuracy MFC (Mass Flow Controller) mass flowmeters ensure precise and stable gas supply speeds, including options for pre-mixing source gases, vital for consistent film quality.
  • Reliable High-Vacuum Environment: Robust stainless steel vacuum flanges with various adapting ports ensure excellent sealing, achieving and maintaining high vacuum degrees necessary for sensitive CVD processes.
  • User-Friendly Operation & Data Analysis: Select models, like the KT-CTF14 Pro, feature a 7-inch TFT touch screen controller, simplifying program setting and enabling easy analysis of historical data.
  • Versatility for Diverse Applications: Our furnaces are not limited to CVD; they are also ideal for diffusion, annealing, sintering, and other thermo-treatments under vacuum or controlled atmospheres.
  • Energy-Efficient Design: Featuring high-quality ceramic fiber insulation and a double-layer structure, our furnaces minimize heat loss, reducing external temperatures and saving energy.
  • Durable and Customizable Materials: Furnace tubes are available in various materials like heat-resistant steel, high-purity quartz glass, and ceramics to suit diverse chemical environments and temperature requirements.

Principle of Operation

The Multi-Heating Zones CVD Tube Furnace utilizes the chemical vapor deposition (CVD) process to deposit thin films onto substrates. Gaseous precursors, typically metal-organic compounds and/or hydrides, are introduced into the furnace chamber. These precursors react chemically at controlled temperatures to form a solid film material on the substrate. The furnace's multiple heating zones enable precise control over the deposition temperature and temperature gradient across the substrate, allowing for the deposition of high-quality films with tailored properties such as thickness, composition, and crystallinity. A vacuum system is integrated to remove impurities and control the deposition pressure, ensuring optimal process conditions.

Applications

Our Multi-Heating Zones CVD Tube Furnaces are widely used in various advanced fields, including:

  • Chemical Vapor Deposition (CVD): Growth of thin films for electronic devices, semiconductors, solar cells, coatings, and nanomaterials.
  • Diffusion: Precise doping of semiconductors and metals.
  • Annealing: Heat treatment of materials to enhance their structural and physical properties.
  • Sintering: Bonding of powdered materials through controlled heat and pressure to form solid structures.
  • Thermo-treatments: A wide range of controlled heating and cooling processes for material research and modification.
  • Element Analysis and Determination: Preparation of samples for analytical purposes.
  • Material Processing: Quenching, annealing, and tempering of small steel pieces, development of electronic ceramics, and other new materials.

Technical Specifications

Furnace model KT-CTF14-60
Max. temperature 1400℃
Constant work temperature 1300℃
Furnace tube material High purity Al2O3 tube
Furnace tube diameter 60mm
Heating zone 2x450mm
Chamber material Alumina polycrystalline fiber
Heating element Silicon Carbide
Heating rate 0-10℃/min
Thermal couple  S type
Temperature controller Digital PID controller/Touch screen PID controller
Temperature control accuracy ±1℃
Gas precise control unit
Flow meter MFC mass flow meter
Gas channels 4 channels
Flow rate MFC1: 0-5SCCM O2
MFC2: 0-20SCMCH4
MFC3: 0- 100SCCM H2
MFC4: 0-500 SCCM N2
Linearity ±0.5% F.S.
Repeatability ±0.2% F.S.
 Pipe line and valve Stainless steel
Maximum Operating Pressure 0.45MPa
Flow meter controller Digital Knob controller/Touch screen controller
Standard vacuum unit(Optional)
Vacuum pump Rotary vane vacuum pump
Pump flow rate 4L/S
Vacuum suction port KF25
Vacuum gauge Pirani/Resistance silicon vacuum gauge
Rated vacuum pressure 10Pa
High vacuum unit(Optional)  
Vacuum pump Rotary vane pump+Molecular pump
Pump flow rate 4L/S+110L/S
Vacuum suction port KF25
Vacuum gauge Compound vacuum gauge
Rated vacuum pressure 6x10-5Pa
Above specifications and setups can be customized

Standard Package

No. Description Quantity
1 Furnace 1
2 Quartz tube (or other material as per order) 1
3 Vacuum flange set 2
4 Tube thermal block 2
5 Tube thermal block hook 1
6 Heat resistant glove 1
7 Precise gas control unit (if ordered) 1
8 Vacuum unit (if ordered) 1
9 Operation manual 1

Deep Customization for Your Unique Needs

KINTEK excels in providing deeply customized furnace solutions to precisely meet unique experimental and production requirements. Beyond our standard configurations, we offer a wide array of optional setups and modifications:

  • In-tube gas detection and monitoring (e.g., H2, O2).
  • Independent furnace temperature monitoring and recording systems.
  • RS 485 communication port for PC remote control and data exporting.
  • Versatile gas feeding flow rate control options, including various mass flowmeters and float flowmeters.
  • Advanced touch screen temperature controllers with user-friendly interfaces and extensive programming capabilities.
  • Comprehensive high vacuum pump station setups, incorporating vane vacuum pumps, molecular pumps, diffusion pumps, and more.
  • Custom furnace dimensions, heating zone configurations, and material choices.

Tell us your challenge, and we'll engineer the solution.

Partner with KINTEK for Your High-Temperature Solutions

With a strong foundation in R&D and in-house manufacturing, KINTEK is dedicated to supplying laboratories worldwide with advanced high-temperature furnace systems, including Muffle Furnaces, Tube Furnaces, Rotary Furnaces, Vacuum & Atmosphere Furnaces, and specialized CVD/PECVD/MPCVD Systems. Our commitment to deep customization ensures that you receive a furnace perfectly tailored to your specific experimental goals.

Ready to elevate your material processing and research capabilities? Discuss your requirements with our expert team.

Contact Us for a Custom Solution or Quote

FAQ

What Is A Tube Furnace And How Does It Work?

A tube furnace is a heating device that generates heat through a heat source and transfers this heat to the workpiece or medium via the furnace tube. It provides stable and uniform heating suitable for various industrial applications. The temperature control system monitors the furnace temperature using thermocouples or other sensors, feeding the signal back to the controller which adjusts the power output of the heating elements to maintain precise temperature control.

What Are The Main Applications Of Multi-zone Tube Furnaces?

Multi-zone tube furnaces are used in various commercial and research applications, including semiconductor and battery production, thermocouple and mineral-insulated cable manufacturing, vacuum brazing and heat treatment, vacuum curing and sintering, water/waste/soil testing, aerospace ceramic and metals testing, oil and gas analysis, solid oxide fuel cells, and polymer composites/graphene production. They're also used for metal heat treatments (quenching, tempering, annealing), preheating for welding, ceramic/powder metallurgy sintering, coating treatments, and material research experiments.

What Is A Vertical Tube Furnace?

A vertical tube furnace is a high-temperature heating device designed in a vertical orientation, offering precise temperature control, uniform heating, and efficient energy usage. Its vertical design is space-saving and particularly useful for processes that benefit from a vertical setup.

What Is A Vacuum Induction Furnace?

A vacuum induction furnace is a specialized heating device that melts metals in a vacuum environment using induction heating technology. It is designed to remove impurities and improve the quality of the melted metals by preventing oxidation and contamination.

What Are The Main Applications Of A Vacuum Furnace?

Vacuum furnaces are primarily used for vacuum quenching (tempering, annealing) to achieve desired material properties, vacuum brazing for welding below the base metal's melting point, vacuum sintering to bond metal powder grains into parts, and vacuum plus magnetism for metal and magnetic material treatment. They are also widely used in semiconductor devices, optical thin films, functional coatings, nanomaterials, and other fields, providing important technical support for material preparation and functional improvement.

What Is An Atmosphere Furnace Used For?

Atmosphere furnaces are widely used in material processing, metal processing, semiconductor manufacturing, solar cell production, optical materials, ceramics and glass industry, electronic material manufacturing, and research and development of new energy materials.

What Are The Main Applications Of Tube Furnaces?

Tube furnaces are widely used for gas quenching tests under vacuum or atmospheric conditions, heat treatment applications including syntheses and purifications, oxidation, diffusion, calcination, and thermal annealing of inorganic or organic compounds. They are also used in material testing, thermal processing, and chemical reactions where controlled heating and cooling rates are required. Vertical tube furnaces are particularly suitable for processes where samples need to be dropped into the furnace from the top.

What Are The Key Features Of Multi-zone Tube Furnaces?

Key features include: 1) Flexible annealing and chemical vapor deposition capabilities, 2) Accommodation of samples up to 60mm (2 inches), 3) Built-in manifold for easy gas delivery, 4) Natural temperature gradients with cooler ends and uniform heating in the center, 5) Adaptability for various gases or vacuum conditions, and 6) Multiple independently controlled heating zones for precise temperature profiles.

What Are The Applications Of A Vertical Tube Furnace?

Vertical tube furnaces are widely used in material testing, thermal processing, and chemical reactions requiring controlled heating and cooling rates. They are also used in chemical engineering for producing synthetic resins, rubber, paints, and dyes; in the food industry for baking, drying, and sterilization; and in metallurgy for smelting, melting, and heat treatment processes.

What Are The Main Applications Of Vacuum Induction Furnaces?

Vacuum induction furnaces are widely used in industries such as aerospace, metallurgy, and materials research for processes like melting, sintering, heat treatment, and brazing of metals and alloys. They are particularly useful for producing high-purity metals and advanced materials.

What Are The Key Features Of A Vacuum Furnace?

A vacuum furnace heats materials, mostly metals, at extremely high temperatures with low pollution and high consistency. Materials can be loaded vertically or horizontally. Vacuum furnaces can have batch or continuous designs, depending on cooling medium, load size, temperature, and pressure. They come in hot wall and cold wall designs, with cold wall furnaces offering higher operating temperature ranges, faster heating and cooling, and greater temperature uniformity.

What Are The Key Features Of An Atmosphere Furnace?

The key features of an atmosphere box furnace include its ability to maintain a specific gas environment, such as inert gases (e.g., nitrogen, argon), reducing gases (e.g., hydrogen), or vacuum conditions, to prevent oxidation, contamination, or unwanted chemical reactions during heating. The furnace typically consists of a high-temperature-resistant box chamber, heating elements, and a gas supply system. Advanced models may include programmable temperature controllers, uniform heating zones, and safety interlocks to ensure operational reliability.

What Are The Advantages Of Using A Tube Furnace?

Tube furnaces offer several advantages including mature technology, simple furnace structure, low power consumption, high thermal efficiency, ease of operation and control, continuous production capability, precise temperature control, uniform temperature distribution, and adaptability to different atmospheres. They also enable higher yield of products, high product concentration, and the ability to recover most cracked gas and flue gas. Multiple furnaces can be combined for large-scale production.

How Does A Multi-zone Tube Furnace Work?

A multi-zone tube furnace works by: 1) Generating heat through multiple independently controlled heating elements, 2) Transferring this heat uniformly through the furnace tube to the workpiece, 3) Creating either precise temperature gradients (for processes like CVD film growth) or extended constant-temperature zones (when multiple zones are set to the same temperature), and 4) Maintaining stable heating conditions suitable for various industrial processes.

What Are The Advantages Of A Vertical Tube Furnace?

Vertical tube furnaces offer several advantages, including a smaller footprint compared to horizontal furnaces, making them ideal for laboratories with limited space. They also provide efficient and energy-saving operation, precise temperature control, flexibility in use, ease of operation, safety, reliability, and compliance with environmental standards.

How Does A Vacuum Induction Furnace Work?

The furnace operates by creating a vacuum in the chamber to remove air and gases, preventing oxidation. Induction heating is then used to melt the metals. This combination of vacuum and induction heating ensures a clean, controlled environment for high-quality metal processing.

How Does A Vacuum Furnace Work?

The working principle of a vacuum furnace involves removing air and gases from the chamber to create a vacuum, which prevents oxidation and contamination. Heating elements generate heat, and a temperature control system regulates the heating process to ensure precise and consistent results. The vacuum system pumps the furnace chamber to create a vacuum, and the heating element then heats the chamber while the temperature control system regulates heating speed and holding time, allowing materials to be heated under vacuum conditions.

How Does An Atmosphere Furnace Work?

A tube furnace generates heat through a heat source and transfers this heat to the heated workpiece or medium via the furnace tube. This process provides stable and uniform heating suitable for various industrial applications. The principle of sintering involves heating materials to high temperatures below their melting points, causing particles to bond and form a solid structure. Heat and sometimes pressure are applied to compact and densify materials, enhancing their mechanical and physical properties.

What Types Of Tube Furnaces Are Available?

There are various types of tube furnaces including laboratory quartz tube furnaces, split multi-heating zone rotary tube furnaces, multi-zone tube furnaces, high temperature tube furnaces (up to 1700°C), PECVD tube furnaces for thin film deposition, vacuum tube furnaces, and vertical tube furnaces. These come with different features like rapid heating, adjustable tilt, 360° rotation, customizable heating zones, and vacuum readiness to suit different applications.

What Are The Advantages Of Using A Multi-zone Tube Furnace?

Advantages include: 1) Mature, reliable technology with simple furnace structure, 2) Low power consumption with high thermal efficiency, 3) Easy operation and precise control, 4) Capability for continuous production, 5) Ability to create extended uniform heating zones or precise temperature gradients, 6) Higher product yields in chemical processes, 7) Ability to recover process gases, 8) Broad raw material applicability, and 9) Scalability through furnace combination for large-scale production.

How Does A Vertical Tube Furnace Work?

A vertical tube furnace generates heat through a heat source and transfers this heat to the heated workpiece or medium via the furnace tube. This process ensures stable and uniform heating, making it suitable for various industrial applications.

What Are The Advantages Of Using A Vacuum Induction Furnace?

Key advantages include: 1. Contamination-free processing due to the absence of oxygen and reactive gases. 2. Precise temperature control for consistent results. 3. Versatility in handling various materials and processes. 4. High efficiency with minimal heat loss. 5. Improved product quality by removing impurities.

What Are The Advantages Of Using A Vacuum Furnace?

The benefits of a vacuum furnace include precise temperature control within a small area, low contamination of the product by carbon, oxygen, and other gases, quick cooling (quenching) of the product, and computer-controlled processes to ensure metallurgical repeatability. Additionally, vacuum furnaces provide a highly pure processing environment, fast processing speed due to no need for atmosphere adjustment, and strong controllability of the processing process as it is not affected by the atmosphere.

What Are The Advantages Of Using An Atmosphere Furnace?

The advantages of an atmosphere furnace include strong environmental control capability by adjusting atmosphere components, lower cost compared to vacuum furnaces, and a wide range of applications suitable for various materials like metals and ceramics. Additionally, atmosphere tube furnaces offer precise temperature control, flexible atmosphere control, high heating efficiency, energy conservation and environmental protection, safe and reliable operation, wide applicability, and reasonable structural design.

What Temperature Ranges Can Tube Furnaces Achieve?

Tube furnaces are available in various temperature ranges to suit different applications. Standard models typically reach up to 1200°C, while high-temperature models can achieve 1400°C to 1700°C. Some specialized models can even reach up to 2000°C. The temperature capability depends on the heating elements and furnace tube materials used (such as quartz or alumina).

What Types Of Multi-zone Tube Furnaces Are Available?

Available types include: 1) Split multi-heating zone rotary tube furnaces (with tilt and rotation capabilities), 2) Laboratory quartz tube furnaces (up to 1700°C with 1-10 zones), 3) Rapid thermal processing (RTP) furnaces with fast heating rates, 4) CVD tube furnaces for chemical vapor deposition, 5) PECVD furnaces for plasma-enhanced processes, 6) Vacuum tube furnaces, and 7) High-pressure tube furnaces. These come in various configurations with customizable zone numbers, temperature ranges, and special features like vacuum/atmosphere control.

What Types Of Vertical Tube Furnaces Are Available?

Vertical tube furnaces come in various types, including those with single or multiple heating zones, rapid thermal processing (RTP) capabilities, vacuum stations, and customizable solutions for specific lab needs such as CVD (Chemical Vapor Deposition) and PECVD (Plasma Enhanced Chemical Vapor Deposition).

What Types Of Vacuum Induction Furnaces Are Available?

Vacuum induction furnaces come in various designs including batch or continuous types, and hot wall or cold wall configurations. They can also be customized based on cooling medium, load size, temperature requirements, and pressure conditions to suit specific industrial or research needs.

What Types Of Materials Can Be Processed In A Vacuum Furnace?

Vacuum furnaces are primarily used for processing metals, including sintering, annealing, and brazing. They are also suitable for ceramics, composites, and other advanced materials, especially in applications requiring high purity and precise temperature control, such as semiconductor devices, optical thin films, and nanomaterials.

What Types Of Gases Can Be Used In An Atmosphere Furnace?

An atmosphere furnace can maintain specific gas environments such as inert gases (e.g., nitrogen, argon), reducing gases (e.g., hydrogen), or vacuum conditions to prevent oxidation, contamination, or unwanted chemical reactions during heating.

Can Tube Furnaces Operate Under Different Atmospheres?

Yes, tube furnaces are versatile and can operate under various atmospheres including air, inert gases (like argon or nitrogen), vacuum, and specialized gas mixtures. This makes them suitable for a wide range of processes including oxidation, reduction, annealing, and chemical vapor deposition (CVD). Many models come with vacuum-ready designs and gas control systems for precise atmosphere management.

Why Choose A Vertical Tube Furnace Over A Horizontal One?

A vertical tube furnace is chosen over a horizontal one primarily for its space-saving design and the ability to benefit from gravity-assisted processes. The vertical setup can aid in even heat and material distribution, making it ideal for specific experiments or manufacturing processes.

Why Is Temperature Control Important In Vacuum Induction Furnaces?

Precise temperature control is crucial to ensure uniform heating, prevent material degradation, and achieve consistent results in processes like melting, sintering, or heat treatment. Advanced control systems in these furnaces maintain accurate temperatures throughout the process.

What Is The Difference Between Hot Wall And Cold Wall Vacuum Furnaces?

Hot wall vacuum furnaces have the heating elements and insulation inside the vacuum chamber, while cold wall furnaces have these components outside the chamber. Cold wall furnaces offer higher operating temperature ranges, faster heating and cooling, and greater temperature uniformity compared to hot wall designs.

What Safety Features Are Available In Advanced Atmosphere Furnaces?

Advanced atmosphere furnaces may include programmable temperature controllers, uniform heating zones, and safety interlocks to ensure operational reliability. A program-controlled atmosphere furnace includes a protection system that monitors critical parameters such as furnace temperature and oxygen content. In case of any abnormalities, the system can automatically shut down or trigger an alarm to protect both the furnace and the samples inside.

What Makes KINTEK Tube Furnaces Special?

KINTEK tube furnaces stand out for their precision temperature control (with some models offering rapid heating up to 100°C/sec), customizable heating zones (from 1 to 10 zones), vacuum-ready designs, and safety certifications. They offer versatile solutions for advanced applications like material synthesis, CVD, sintering, and semiconductor research, with options for rotary mechanisms, split chambers, and plasma-enhanced configurations.

What Temperature Ranges Can Vertical Tube Furnaces Achieve?

Vertical tube furnaces can achieve high temperatures, typically up to 1800°C, depending on the model and configuration. They are designed for precision heating and can be customized to meet specific temperature requirements for various applications.

What Materials Can Be Processed In A Vacuum Induction Furnace?

These furnaces can process a wide range of materials including metals, alloys, ceramics, and composites. They are particularly effective for materials that require high purity or are sensitive to oxidation, such as titanium, nickel-based alloys, and rare earth metals.

Can Vacuum Furnaces Be Customized For Specific Applications?

Yes, vacuum furnaces can be customized based on cooling medium, load size, temperature, and pressure requirements. They can be designed as batch or continuous systems and can be tailored for specific applications such as sintering, brazing, or heat treatment, with options for vertical or horizontal loading.

Are Vertical Tube Furnaces Customizable?

Yes, vertical tube furnaces are highly customizable. They can be tailored with features such as multiple heating zones, rapid heating capabilities, vacuum systems, and specific atmosphere controls to meet the unique needs of different research and industrial applications.

How Does The Vacuum Environment Benefit Material Processing?

The vacuum environment eliminates oxygen and other reactive gases, preventing oxidation and contamination of materials. It also allows for better control of the processing atmosphere, reduces heat loss, and enables higher temperature operations without material degradation.
View more faqs for this product

4.9

out of

5

Incredible precision and control! The multi-zone heating is a game-changer for our lab.

Elara Voss

4.8

out of

5

Fast delivery and flawless setup. This furnace exceeded our expectations!

Rafael Mendoza

4.7

out of

5

Worth every penny! The quality and durability are unmatched.

Sienna Khatri

4.9

out of

5

Top-notch technology. The temperature uniformity is perfect for our research.

Lucian Bjornsson

4.8

out of

5

Efficient and reliable. Our experiments have never been smoother.

Anika Zhou

4.7

out of

5

Great value for money. The build quality is impressive.

Dmitri Volkov

4.9

out of

5

A must-have for any serious lab. The performance is stellar.

Zara Al-Farsi

4.8

out of

5

Quick setup and easy to use. Highly recommend this furnace!

Mateo Silva

4.7

out of

5

Durable and efficient. Perfect for high-temperature applications.

Yara Petrov

4.9

out of

5

The multi-zone feature is revolutionary. Our productivity has soared.

Kai Nakamura

4.8

out of

5

Exceptional craftsmanship. This furnace is built to last.

Isla Donovan

4.7

out of

5

Reliable and precise. A fantastic investment for any lab.

Elias Schmidt

4.9

out of

5

Cutting-edge technology. The temperature control is impeccable.

Nia Okoro

4.8

out of

5

Fast shipping and excellent customer service. Very satisfied!

Leo Costa

4.7

out of

5

High-quality materials and superb performance. Highly recommend.

Mira Patel

4.9

out of

5

The best furnace we've used. The multi-zone heating is brilliant.

Hugo Lindgren

4.8

out of

5

Perfect for our CVD needs. The machine is a workhorse.

Ayla Demir

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Multi Heating Zones CVD Tube Furnace Machine for Chemical Vapor Deposition Equipment

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