CVD & PECVD Furnace

Slide PECVD Tube Furnace with Liquid Gasifier PECVD Machine

Item Number : KT-PE12

Price varies based on specs and customizations

Max. temperature: 1200℃
RF Plasma Output Power: 5-500W
Rated vacuum pressure: 10Pa~6x10-4Pa

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Unlock Precision Thin Film Deposition

The KINTEK Slide PECVD Tube Furnace with Liquid Gasifier is a state-of-the-art system engineered for versatile and high-performance thin film deposition. Designed to meet the rigorous demands of modern research and production, it combines a 500W RF plasma source, an innovative slide-out furnace for rapid thermal cycling, precise gas flow control, and a robust vacuum station. Whether for electronics, semiconductors, optics, or advanced materials science, this system delivers exceptional results and reliability. At KINTEK, we leverage our exceptional R&D expertise and in-house manufacturing to provide advanced furnace solutions like this, and offer strong deep customization to precisely meet your unique experimental requirements.

Key Features & Benefits

The Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine offers numerous benefits to enhance your research and production:

Enhanced Power Generation: The innovative graphite boat structure significantly improves the power output of solar cell wafers.
Uniform Cell Quality: Effectively eliminates color differences in tubular PECVD cells, ensuring consistent results.
Versatile RF Plasma Source: Features an automatic matching RF plasma source with a wide output power range (5-500W) for stable and adaptable performance across various applications.
Rapid Thermal Cycling: The furnace chamber sliding system enables high-speed heating and cooling, significantly reducing processing time. Auxiliary forced air circulation further accelerates the cooling rate.
Automated Operation: Optional automated sliding movement enhances efficiency and reduces manual intervention for streamlined workflows.
Precise Temperature Management: PID programmable temperature control ensures accurate temperature regulation. Supports remote and centralized control for added convenience and operational flexibility.
Accurate Gas Control: High-accuracy MFC mass flowmeters precisely control source gases, ensuring a stable, consistent, and premixed gas supply.
High-Performance Vacuum System: The stainless steel vacuum flange with multiple adapting ports accommodates various vacuum pump station configurations, ensuring a high vacuum degree and reliable sealing.
User-Friendly Interface: Equipped with the CTF Pro 7-inch TFT touch screen controller, simplifying program setting, operation, and allowing for easy analysis of historical data.

Versatile Applications

The Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine is ideal for a wide range of applications, including:

Chemical Vapor Deposition (CVD)
Plasma Enhanced Chemical Vapor Deposition (PECVD)
Thin film deposition for various materials
Solar cell fabrication and research
Semiconductor processing
Nanotechnology research and development
Advanced materials science studies
General research and development in controlled atmospheres

Explore Our System Configurations

KINTEK offers various CVD system setups to meet diverse experimental needs. Below are examples of available configurations:

PECVD side

Operating Principle

The Slide PECVD Tube Furnace With Liquid Gasifier PECVD Machine employs low-temperature plasma to generate a glow discharge in the process chamber's cathode (sample tray). The glow discharge (or another heat source) raises the sample's temperature to a predetermined level. Then, controlled amounts of process gas are introduced, undergoing chemical and plasma reactions to form a solid film on the sample's surface.

Built-in Safety Advantages

Over-Current and Over-Temperature Protection: The furnace is equipped with over-current protection and over-temperature alarming functions, automatically shutting off power if limits are exceeded.
Thermocouple Failure Detection: A built-in thermocouple detecting function will stop heating and trigger an alarm if a broken or failed thermocouple is detected, preventing uncontrolled heating.
Power Failure Restart Function: The PE Pro controller supports a power failure restarting function, allowing the furnace to resume its heating program automatically once power is restored after an outage.

Technical Specifications

Furnace model	KT-PE12-60
Max. temperature	1200℃
Constant work temperature	1100℃
Furnace tube material	High purity quartz
Furnace tube diameter	60mm
Heating zone length	1x450mm
Chamber material	Japan alumina fiber
Heating element	Cr2Al2Mo2 wire coil
Heating rate	0-20℃/min
Thermal couple	Build in K type
Temperature controller	Digital PID controller/Touch screen PID controller
Temperature control accuracy	±1℃
Sliding distance	600mm
RF Plasma unit
Output Power	5 -500W adjustable with ± 1% stability
RF frequency	13.56 MHz ±0.005% stability
Reflection Power	350W max.
Matching	Automatic
Noise
Cooling	Air cooling.
Gas precise control unit
Flow meter	MFC mass flow meter
Gas channels	4 channels
Flow rate	MFC1: 0-5SCCM O2 MFC2: 0-20SCMCH4 MFC3: 0- 100SCCM H2 MFC4: 0-500 SCCM N2
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Pipe line and valve	Stainless steel
Maximum Operating Pressure	0.45MPa
Flow meter controller	Digital Knob controller/Touch screen controller
Standard vacuum unit(Optional)
Vacuum pump	Rotary vane vacuum pump
Pump flow rate	4L/S
Vacuum suction port	KF25
Vacuum gauge	Pirani/Resistance silicon vacuum gauge
Rated vacuum pressure	10Pa
High vacuum unit(Optional)
Vacuum pump	Rotary vane pump+Molecular pump
Pump flow rate	4L/S+110L/S
Vacuum suction port	KF25
Vacuum gauge	Compound vacuum gauge
Rated vacuum pressure	6x10-4Pa
Above specifications and setups can be customized

Standard Package Contents

No.	Description	Quantity
1	Furnace	1
2	Quartz tube	1
3	Vacuum flange	2
4	Tube thermal block	2
5	Tube thermal block hook	1
6	Heat resistant glove	1
7	RF plasma source	1
8	Precise gas control	1
9	Vacuum unit	1
10	Operation manual	1

Customization & Optional Setups

At KINTEK, we pride ourselves on our strong deep customization capability. We can tailor the Slide PECVD Tube Furnace to precisely meet your unique experimental requirements. Available optional setups include:

In-tube gas detection and monitoring (e.g., H2, O2)
Independent furnace temperature monitoring and recording systems
RS 485 communication port for PC remote control and data exporting
Customized gas feeding flow rate control (mass flowmeters or float flowmeters)
Advanced touch screen temperature controller with versatile, operator-friendly functions
Various high vacuum pump station setups (e.g., vane vacuum pump, molecular pump, diffusion pump)

Partner with KINTEK for Your Advanced Furnace Needs

KINTEK's Slide PECVD Tube Furnace is designed for adaptability and high performance. We understand that your research is unique. Leverage our strong deep customization capabilities to tailor this system to your exact specifications. Whether you need different temperature ranges, specific gas configurations, advanced control features, or unique vacuum setups, our expert team is ready to assist.

Ready to elevate your research or production? Discuss your requirements with our experts and get a personalized quote. Please fill out our contact form, and one of our specialists will be in touch shortly to help you configure the perfect PECVD solution!

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FAQ

What Is The Principle Of An MPCVD Machine?

An MPCVD (Microwave Plasma Chemical Vapor Deposition) machine operates by using a microwave generator to produce plasma by ionizing a gas mixture. This plasma is housed in a reaction chamber under low pressure, where the substrate is held in place by a substrate holder. The key components include a Microwave Generator, Plasma Chamber, Gas Delivery System, Substrate Holder, and Vacuum System.

What Is A Tube Furnace And How Does It Work?

A tube furnace is a heating device that generates heat through a heat source and transfers this heat to the workpiece or medium via the furnace tube. It provides stable and uniform heating suitable for various industrial applications. The temperature control system monitors the furnace temperature using thermocouples or other sensors, feeding the signal back to the controller which adjusts the power output of the heating elements to maintain precise temperature control.

What Are The Main Applications Of Multi-zone Tube Furnaces?

Multi-zone tube furnaces are used in various commercial and research applications, including semiconductor and battery production, thermocouple and mineral-insulated cable manufacturing, vacuum brazing and heat treatment, vacuum curing and sintering, water/waste/soil testing, aerospace ceramic and metals testing, oil and gas analysis, solid oxide fuel cells, and polymer composites/graphene production. They're also used for metal heat treatments (quenching, tempering, annealing), preheating for welding, ceramic/powder metallurgy sintering, coating treatments, and material research experiments.

What Is The Principle Of A CVD Machine?

The principle of Chemical Vapor Deposition (CVD) involves introducing the vapor of gaseous or liquid reactants containing film elements and other necessary gases into a reaction chamber. By applying energy in the form of increased temperature, plasma action, light radiation, or other means, chemical reactions occur on the substrate surface, generating new solid substances that deposit as thin films. The working principle of a CVD furnace involves introducing precursor gases into the furnace chamber, where high temperatures cause these gases to react or decompose near the substrate surface. The desired material deposits on the substrate as a solid film, while by-products and unused gases are evacuated through an exhaust or vacuum system.

What Are The Common Applications Of A Split Tube Furnace?

Split tube furnaces are commonly used for material testing (such as tensile testing), pyrolysis of organic materials, chemical vapor deposition (CVD) for thin film deposition, graphitization of carbon-containing materials, and sintering of ceramics. These applications benefit from the precise temperature control and easy sample handling offered by split tube furnaces.

What Is A Vertical Tube Furnace?

A vertical tube furnace is a high-temperature heating device designed in a vertical orientation, offering precise temperature control, uniform heating, and efficient energy usage. Its vertical design is space-saving and particularly useful for processes that benefit from a vertical setup.

What Are The Advantages Of Using An MPCVD Machine?

MPCVD machines offer several advantages: they eliminate contamination from hot wires (non-polar discharge), allow the use of multiple gases, provide stable control of reaction temperature, enable large-area stable discharge plasma, and offer precise control over film thickness, purity, and crystal quality. Additionally, they produce large-area diamond films, ensure stable conditions, maintain consistent sample quality, and are cost-effective.

What Are The Main Applications Of Tube Furnaces?

Tube furnaces are widely used for gas quenching tests under vacuum or atmospheric conditions, heat treatment applications including syntheses and purifications, oxidation, diffusion, calcination, and thermal annealing of inorganic or organic compounds. They are also used in material testing, thermal processing, and chemical reactions where controlled heating and cooling rates are required. Vertical tube furnaces are particularly suitable for processes where samples need to be dropped into the furnace from the top.

What Are The Key Features Of Multi-zone Tube Furnaces?

Key features include: 1) Flexible annealing and chemical vapor deposition capabilities, 2) Accommodation of samples up to 60mm (2 inches), 3) Built-in manifold for easy gas delivery, 4) Natural temperature gradients with cooler ends and uniform heating in the center, 5) Adaptability for various gases or vacuum conditions, and 6) Multiple independently controlled heating zones for precise temperature profiles.

What Are The Advantages Of Using A CVD Machine?

CVD provides high purity, uniformity, and conformality, making it suitable for coating complex geometries. It is used in industries like semiconductor, aerospace, and biomedical. Unlike PVD, CVD is not limited to line-of-sight application, and the coating bonds to the surface during the reaction, creating superior adhesion.

What Are The Key Features Of A Split Tube Furnace?

A split tube furnace typically offers options for 1, 2, 3, or 5 heated zones, with a heated length ranging from 200-600mm and a heated diameter of 40-100mm. It includes dual-layer forced air-cooling to ensure a safe case temperature and uses a heating coil as the heating source, capable of reaching temperatures up to 1200°C. The furnace is designed with a cylindrical tube split lengthwise, often in two halves joined with hinges and equipped with pneumatic dampening struts for smooth operation.

What Are The Applications Of A Vertical Tube Furnace?

Vertical tube furnaces are widely used in material testing, thermal processing, and chemical reactions requiring controlled heating and cooling rates. They are also used in chemical engineering for producing synthetic resins, rubber, paints, and dyes; in the food industry for baking, drying, and sterilization; and in metallurgy for smelting, melting, and heat treatment processes.

What Are The Key Applications Of MPCVD Machines?

MPCVD machines are primarily used for high-purity lab-grown diamond synthesis, including diamond films and other advanced materials. Their applications extend to semiconductor research, optics, and MEMS (Micro-Electro-Mechanical Systems) due to their ability to produce high-quality, homogeneous films with precise control.

What Are The Advantages Of Using A Tube Furnace?

Tube furnaces offer several advantages including mature technology, simple furnace structure, low power consumption, high thermal efficiency, ease of operation and control, continuous production capability, precise temperature control, uniform temperature distribution, and adaptability to different atmospheres. They also enable higher yield of products, high product concentration, and the ability to recover most cracked gas and flue gas. Multiple furnaces can be combined for large-scale production.

How Does A Multi-zone Tube Furnace Work?

A multi-zone tube furnace works by: 1) Generating heat through multiple independently controlled heating elements, 2) Transferring this heat uniformly through the furnace tube to the workpiece, 3) Creating either precise temperature gradients (for processes like CVD film growth) or extended constant-temperature zones (when multiple zones are set to the same temperature), and 4) Maintaining stable heating conditions suitable for various industrial processes.

What Are The Applications Of A CVD Machine?

CVD is used in various applications, including semiconductor device production (e.g., silicon nitride insulating layers), optical coatings, protective coatings, and advanced materials like graphene and carbon nanotubes, which have unique electrical, thermal, and mechanical properties. It is also used to deposit conformal films and modify substrate surfaces in ways traditional techniques cannot. Applications include atomic layer deposition, integrated circuits, photovoltaic devices, wear-resistant coatings, polymer coatings with special properties, metal-organic frameworks for gas sensing, and membrane coatings for water treatment.

How Does A Split Tube Furnace Work?

A split tube furnace operates by generating heat through a heating coil, which then transfers this heat to the workpiece or medium inside the furnace tube. This process ensures stable and uniform heating, making it suitable for various industrial and laboratory applications. The furnace can be configured with multiple heated zones and includes features like forced air-cooling to maintain safe external temperatures.

What Are The Advantages Of A Vertical Tube Furnace?

Vertical tube furnaces offer several advantages, including a smaller footprint compared to horizontal furnaces, making them ideal for laboratories with limited space. They also provide efficient and energy-saving operation, precise temperature control, flexibility in use, ease of operation, safety, reliability, and compliance with environmental standards.

What Are The Main Components Of An MPCVD Machine?

The main components of an MPCVD machine include a microwave generator (to produce plasma), a reaction chamber (to house the substrate and gas mixture under low pressure), a substrate holder (to hold the substrate during deposition), a gas delivery system (to introduce and control the gas mixture), and a vacuum system (to maintain the necessary low-pressure environment).

What Types Of Tube Furnaces Are Available?

There are various types of tube furnaces including laboratory quartz tube furnaces, split multi-heating zone rotary tube furnaces, multi-zone tube furnaces, high temperature tube furnaces (up to 1700°C), PECVD tube furnaces for thin film deposition, vacuum tube furnaces, and vertical tube furnaces. These come with different features like rapid heating, adjustable tilt, 360° rotation, customizable heating zones, and vacuum readiness to suit different applications.

What Are The Advantages Of Using A Multi-zone Tube Furnace?

Advantages include: 1) Mature, reliable technology with simple furnace structure, 2) Low power consumption with high thermal efficiency, 3) Easy operation and precise control, 4) Capability for continuous production, 5) Ability to create extended uniform heating zones or precise temperature gradients, 6) Higher product yields in chemical processes, 7) Ability to recover process gases, 8) Broad raw material applicability, and 9) Scalability through furnace combination for large-scale production.

What Are The Key Features Of A CVD Machine?

Key features of a CVD furnace include high temperature capability (typically ranging from 200°C to over 1500°C), precise gas flow control, atmosphere control (vacuum, atmospheric pressure, or low-pressure environments), uniform heating for even thin-film deposition, and an efficient exhaust system to remove by-products and unreacted gases. Key characteristics of a CVD coating process include application at elevated temperatures to facilitate the reaction, typically under vacuum. Contaminants must be removed from the part surface before coating.

What Are The Advantages Of Using A Split Tube Furnace?

The main advantages of a split tube furnace include simplified loading and unloading of samples or equipment, reduced operational downtime, and enhanced efficiency. The split design allows for quick access to the furnace chamber, which is particularly beneficial for applications requiring frequent changes or intricate experimental setups. Additionally, features like pneumatic dampening struts and multiple heating zones further improve usability and performance.

How Does A Vertical Tube Furnace Work?

A vertical tube furnace generates heat through a heat source and transfers this heat to the heated workpiece or medium via the furnace tube. This process ensures stable and uniform heating, making it suitable for various industrial applications.

How Does An MPCVD Machine Enhance Energy Efficiency?

An MPCVD machine enhances energy efficiency through its electrode-less process, which reduces contamination and energy loss. The microwave plasma generation is highly efficient, and the system's modular and scalable design allows for optimized energy use across various industrial applications.

What Temperature Ranges Can Tube Furnaces Achieve?

Tube furnaces are available in various temperature ranges to suit different applications. Standard models typically reach up to 1200°C, while high-temperature models can achieve 1400°C to 1700°C. Some specialized models can even reach up to 2000°C. The temperature capability depends on the heating elements and furnace tube materials used (such as quartz or alumina).

What Types Of Multi-zone Tube Furnaces Are Available?

Available types include: 1) Split multi-heating zone rotary tube furnaces (with tilt and rotation capabilities), 2) Laboratory quartz tube furnaces (up to 1700°C with 1-10 zones), 3) Rapid thermal processing (RTP) furnaces with fast heating rates, 4) CVD tube furnaces for chemical vapor deposition, 5) PECVD furnaces for plasma-enhanced processes, 6) Vacuum tube furnaces, and 7) High-pressure tube furnaces. These come in various configurations with customizable zone numbers, temperature ranges, and special features like vacuum/atmosphere control.

What Types Of CVD Machines Are Available?

There are several types of CVD machines available, including Cylindrical Resonator MPCVD Machine Systems for lab diamond growth, Custom Made Versatile CVD Tube Furnaces for chemical vapor deposition, Slide PECVD Tube Furnaces with liquid gasifiers, Vacuum Hot Press Furnace Machines, Inclined Rotary Plasma Enhanced Chemical Deposition (PECVD) Tube Furnaces, Split Chamber CVD Tube Furnaces with Vacuum Stations, and RF PECVD Systems for radio frequency plasma enhanced chemical vapor deposition. Each type is designed for specific applications and offers unique features.

What Temperature Can A Split Tube Furnace Reach?

A split tube furnace can reach a maximum temperature of 1200°C, making it suitable for high-temperature applications such as material synthesis, CVD, and sintering. The furnace uses a heating coil as the heat source and includes dual-layer forced air-cooling to maintain safe external temperatures during operation.

What Types Of Vertical Tube Furnaces Are Available?

Vertical tube furnaces come in various types, including those with single or multiple heating zones, rapid thermal processing (RTP) capabilities, vacuum stations, and customizable solutions for specific lab needs such as CVD (Chemical Vapor Deposition) and PECVD (Plasma Enhanced Chemical Vapor Deposition).

Why Is MPCVD Preferred For Diamond Growth?

MPCVD is preferred for diamond growth because it provides a high density of charged particles and reactive species, enables deposition of large-area diamond films at lower pressures, and ensures better homogeneity in the as-grown films. These features result in high-purity, high-quality diamonds with precise control over their properties.

Can Tube Furnaces Operate Under Different Atmospheres?

Yes, tube furnaces are versatile and can operate under various atmospheres including air, inert gases (like argon or nitrogen), vacuum, and specialized gas mixtures. This makes them suitable for a wide range of processes including oxidation, reduction, annealing, and chemical vapor deposition (CVD). Many models come with vacuum-ready designs and gas control systems for precise atmosphere management.

Why Is The Split Design Beneficial In A Tube Furnace?

The split design in a tube furnace is beneficial because it allows for quick and easy access to the furnace chamber. This design, often featuring two hinged halves with pneumatic dampening struts, simplifies the handling of complex setups or large samples, reduces operational downtime, and enhances overall efficiency, especially in applications requiring frequent changes or intricate configurations.

Why Choose A Vertical Tube Furnace Over A Horizontal One?

A vertical tube furnace is chosen over a horizontal one primarily for its space-saving design and the ability to benefit from gravity-assisted processes. The vertical setup can aid in even heat and material distribution, making it ideal for specific experiments or manufacturing processes.

What Makes KINTEK Tube Furnaces Special?

KINTEK tube furnaces stand out for their precision temperature control (with some models offering rapid heating up to 100°C/sec), customizable heating zones (from 1 to 10 zones), vacuum-ready designs, and safety certifications. They offer versatile solutions for advanced applications like material synthesis, CVD, sintering, and semiconductor research, with options for rotary mechanisms, split chambers, and plasma-enhanced configurations.

What Temperature Ranges Can Vertical Tube Furnaces Achieve?

Vertical tube furnaces can achieve high temperatures, typically up to 1800°C, depending on the model and configuration. They are designed for precision heating and can be customized to meet specific temperature requirements for various applications.

Are Vertical Tube Furnaces Customizable?

Yes, vertical tube furnaces are highly customizable. They can be tailored with features such as multiple heating zones, rapid heating capabilities, vacuum systems, and specific atmosphere controls to meet the unique needs of different research and industrial applications.

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